White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...

White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...

3D optical microscope is a key metrology technique used in a myriad of industries. White light interferometry (WLI) and confocal microscopy or laser scanning confocal microscopy (LSCM) are the other ...

As a technique, surface metrology is concerned with measuring the small-scale features of a surface. They are a class of techniques that are used across several industries but have found the most use ...